1

Dicing challenges in microelectronics and micro electro-mechanical systems (MEMS)

Year:
2001
Language:
english
File:
PDF, 185 KB
english, 2001
4

Eddy-current microsensor based on thin-film technology

Year:
2002
Language:
english
File:
PDF, 253 KB
english, 2002
9

A magnetoelastic microtransformer-based microstrain gauge

Year:
2006
Language:
english
File:
PDF, 283 KB
english, 2006
10

Thinfilm technologies to fabricate a linear microactuator

Year:
2001
Language:
english
File:
PDF, 271 KB
english, 2001
12

Application of MSM bulk material in a hybrid microactuator

Year:
2008
Language:
english
File:
PDF, 453 KB
english, 2008
13

Therapie cholestatischer Lebererkrankungen

Year:
2006
Language:
german
File:
PDF, 468 KB
german, 2006
21

Design improvements for a linear hybrid step micro-actuator

Year:
2006
Language:
english
File:
PDF, 304 KB
english, 2006
23

Colloquium on Micro Production, Aachen, Germany, 2–3 March 2005

Year:
2006
Language:
english
File:
PDF, 149 KB
english, 2006
24

Development and fabrication of magnetic thin films

Year:
2006
Language:
english
File:
PDF, 281 KB
english, 2006
27

Fabrication and test of multilayer microcoils with a high packaging density

Year:
2008
Language:
english
File:
PDF, 331 KB
english, 2008
28

Fabrication of drive and guide components for micro motors

Year:
2008
Language:
english
File:
PDF, 528 KB
english, 2008
30

Focused ion beam core hole drilling for stress detection in thin-films

Year:
2009
Language:
english
File:
PDF, 216 KB
english, 2009
33

A linear microactuator with enhanced design

Year:
2002
Language:
english
File:
PDF, 157 KB
english, 2002
34

Sputter deposited thin-film multilayer head

Year:
1980
Language:
english
File:
PDF, 714 KB
english, 1980
37

Magnetic Levitation Assisted Guide for a Linear Micro-Actuator

Year:
2006
Language:
english
File:
PDF, 664 KB
english, 2006
38

Development of a Linear Micro-Inductosyn Sensor

Year:
2006
Language:
english
File:
PDF, 925 KB
english, 2006
40

Modularly Designed Magnetoelastic Micro Strain Gauge

Year:
2007
Language:
english
File:
PDF, 318 KB
english, 2007
44

Magnetoelastic Carbon Fiber Micro Strain Sensor

Year:
2009
Language:
english
File:
PDF, 607 KB
english, 2009
49

Slicing induced ABS-cambering in thin film pico sliders

Year:
1999
Language:
english
File:
PDF, 416 KB
english, 1999